Specialty Gas Jumbo Tube Container-MEGC
- The SinoCleansky Specialty Gas Jumbo Tube Container is a 20 ft ISO-capable, multi-modal gas transport module engineered for ultra-high-purity electronic specialty gases.
- Water capacity is 13.2m³, working pressure is 16.6Mpa.
- Designed to handle NF3, HCl, N2O, SF6, CF4, SiH4 and other high-purity media, it is the ideal alternative to multiple small cylinder bundles, reducing logistics cost and on-site cylinder handling while ensuring uninterrupted gas supply.
- Cross-border transport certified: ISO, TPED, DOT, CSC, IMDG, ADR/RID
- All core performance and safety indicators pass independent audit and certification from internationally recognized third-party bodies including TÜV, LRS and SGS.
Descrição
- Ultra-high purity compatibility for 6N gases, with mirror-polish, inert passive film and helium leak inspection.
- Large storage capacity in a 20 ft ISO frame: 12 x 1,095 L seamless cylinders for continuous gas supply.
- Mirror-polish inner surface + inert passive film process to minimize particle release and moisture adsorption.
- Multiple purging cycles followed by helium leak inspection to ensure ultra-low leakage (<1×10^-9 Pa.m3/s level).
- Cross-border transport certified: ISO,GB, TPED, DOT, CSC, IMDG, ADR/RID. International third-party test by TÜV, LRS and SGS.
- MEGC or trailer-mounted design, ready for road, rail and waterway intermodal transport.
Especificações técnicas
Applied to multiple high-purity gases scenario, unlike conventional small cylinders, a Jumbo MEGC replaces bottles with few big tubes — storage, delivery more meanwhile easy to operate, reliable and safety.
- Semiconductor fabs, PV cell manufacturing, flat-panel display and LED production requiring 6N+ gas purity.
- Replaces multiple cylinder bundles, reducing cylinder changeover frequency and labor cost.
- Skid-container (MEGC) or trailer-mounted options for flexible site deployment (2 or 3 chassis).
- Optimized comprehensive gas supply cost with fewer shipments and lower inventory.
- Long-haul & remote-site delivery: serves inland and off-grid fabs located far from gas distribution hubs via road, rail and waterway intermodal transport, removing the need for on-site gas generation.
- Process-specific single-gas modules: dedicated modules for NF3 chamber cleaning, SiH4/N2O deposition or HCl doping keep cross-contamination risk near zero and simplify gas purity qualification.
| N.º do modelo. | SCS12-1095-SiH4 | SCS12-1095-NF3 | SCS12-1095-N2O | SCS12-1095-HCL | SCS12-1095-CF4 | SCS12-1095-SF6 |
| Quantidade de cilindros | 12 | 12 | 12 | 12 | 12 | 12 |
| Meio de enchimento | SiH₄ | NF3 | N2O | HCL | CF4 | SF6 |
| Tipo de aço | 4130X | 4130X | 4130X | 4130X | 4130X | 4130X |
| Pressão de funcionamento | 16.6Mpa | 16.6Mpa | 16.6Mpa | 16.6Mpa | 16.6Mpa | 16.6Mpa |
| Cylinder Water Capacity | 1095L | 1095L | 1095L | 1095L | 1095L | 1095L |
| Dimensão do cilindro/mm | φ559*5400 | φ559*5400 | φ559*5400 | φ559*5400 | φ559*5400 | φ559*5400 |
| Wall thickness/mm | 13.7 | 13.7 | 13.7 | 13.7 | 13.7 | 13.7 |
| Temperatura de funcionamento | -40℃~60℃ | -40℃~60℃ | -40℃~60℃ | -40℃~60℃ | -40℃~60℃ | -40℃~60℃ |
| Equipment (Tare) weight/kg | 17,040 | 17,040 | 17,040 | 17,040 | 17,040 | 17,040 |
| Maximum permissible load mass weight/kg | 4,224 | 7,392 | 8,672 | 8,580 | 8,580 | 13,440 |
| Maximum permissible gross mass weight/kg | 30,480 | 30,480 | 30,480 | 30,480 | 30,480 | 30,480 |
| Water volume/M³ | 13.20 | 13.20 | 13.20 | 13.20 | 13.20 | 13.20 |
| Design service life | 20 years/
≤15,000 cycles |
20 years/
≤15,000 cycles |
20 years/
≤15,000 cycles |
20 years/
≤15,000 cycles |
20 years/
≤15,000 cycles |
20 years/
≤15,000 cycles |
| Overall Dimension/(L*W*H)mm |
6058*2438*2000 (MEGC) |
6058*2438*2000 (MEGC) |
6058*2438*2000 (MEGC) |
6058*2438*2000 (MEGC) |
6058*2438*2000 (MEGC) |
6058*2438*2000 (MEGC) |
Embalagem e envio
Specialty gas jumbo tube containers are classified as MEGCs and eligible for direct delivery. If transported MEGC + semi-trailers, separate shipments are required based on overall dimensions.
